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MSA-600 Measuring dynamic response and topography of MEMS and microstructures

Mar 4, 2026

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Surface topography and dynamic motion analysis and visualization are key to testing and developing microstructures such as MEMS devices (Micro-Electro-Mechanical Systems). The MSA-600 Micro System Analyzer delivers increased measurement flexibility and precision, adapting to the needs of today’s and tomorrow’s microstructures with measurements up to 6 GHz. The Micro System Analyzer provides precise 3D dynamic and static response data that increases device performance while reducing development and manufacturing costs. It enhances and shortens design cycles, simplifies trouble shooting and improves yield. The MSA-600 is the powerful optical measurement solution in research, development (R&D) and quality control (QC).

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