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New micro optical particle counter for large volume flows (NewPARZ)

14.04.2025

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The NewPARZ sensor demonstrator is a compact particle counter for ultra-pure air that works on the principle of a laser scattered light measuring cell. The innovative heart of the sensor is a special photodiode array with an angle filter. The angle filter changes its transmission over a few angular degrees of the incoming scattered light from almost 100 % to an optical density (OD) of over six at the laser wavelength. This means that several measuring points along the laser curtain can be scanned separately and in parallel with the photodiode array, where previously only a single small measuring volume was possible in the state of the art. A nozzle of 20 x 0.5 mm2 was used in the demonstrator and the established 90-degree scattered light method was parallelized with the laser steel. This allows a volume flow of up to 50 l/min to be realised. The sensor concept is further scalable.

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