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Pressure sensor for ultra-high pressure applications (DSNemo)

14.04.2025

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Traditionally, pressure sensors use a bending plate to increase sensitivity. For ultra-high pressure applications, the bending plate can be dispensed with. A sensor without a bending plate has been developed for this pressure range. This enables a much smaller design. The technology platform developed offers the following potential: front plate with a minimum diameter of 1 mm, pressure range up to approx. 20,000 bar, measuring span of > 20 mV/V, maximum operating temperature of 200 °C, use of piezoresistive Si chips and media contact via steel.

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