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High pressure sensor with flush media connection (DS300MPa)

14.04.2025

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Thin-film technology on steel is predominantly used for high-pressure applications above 70 MPa. Sensors with a flush media connection can only be realized with great effort using this technology. For this reason, a technology for a sensor with a front-flush media connection with strict separation from the electrical side was developed.
The technology platform developed offers the following potential: development of customized pressure sensor elements, use of piezoresistive Si chips (high K-factor, approx. 80), use of various metallic materials as deformation bodies possible, including steel, realization of a small flush front surface <  5 mm facing the medium, temperature range up to 200 °C and pressure range > 700 bar.

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