CMUT-based Flow Meter


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Flow measurement based on capacitive micromechanical ultrasonic transducers

Miniaturized, silicon-based, capacitive ultrasonic transducers (CMUT) can be used cost-effectively on an industrial scale to measure the flow of liquids. They can be manufactured in various design configurations using silicon technology and enable the transmission and reception of ultrasonic waves in a wide range of frequency ranges. This allows a wide range of flow rates of liquids in pipes to be detected.
The CMUTs are highly miniaturized and can be combined with drive electronics. Unlike conventional piezoceramic-based ultrasonic transducers, CMUTs have a wide bandwidth as well as low acoustic impedance. In addition, the performance of CMUTs is less dependent on ambient temperature compared to piezo-based ultrasonic transducers.
They can be adapted for different applications, e.g. in the chemical industry or in air conditioning and ventilation systems.

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