ESCP - MIT1 Medium Isolated MEMS Capacitive Pressure Transmitters


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ES Systems has developed a series of medium isolated pressure transmitters suitable for applications with harsh environmental conditions where resistance to corrosive fluids or gases is required. Each sensor integrates a MEMS capacitive pressure sensor die, and a CMOS ASIC for the signal conditioning. The MEMS pressure sensor dies are underpinned by ES Systems’ innovative microfabrication process for silicon capacitive sensors.

The ESCP-MIT1 of capacitive pressure sensor dies integrated into the medium isolated pressure systems provide state-of-the-art accuracy and resolution, excellent long-term stability combined with very good repeatability and hysteresis. The total overall error including thermal offsets is lower than ±0.25% FS.

The ESCP-MIT1 is a family of heavy-duty pressure transmitters made from stainless steel 316L. Each transmitter consists of an ESCP-MIS1 sensor, which is O-ring fitted to the housing. The pressure transmitters come in various standard pneumatic ports as well as custom ones upon request.

The electrical interface can be either analog (4-20 mA, 0-10 V) or digital (I2C). The sensors can be provided calibrated and compensated at various temperature and pressure ranges from 1 bar to 400 bar. Custom configurations of a variety of pneumatic interfaces, Hastelloy or Titanium material, and output interface are available upon request.

Pressure Type: Absolute, Gauge
Pressure Range: Up to 400bar
Power Supply: +8V … +32V
Total Error: < ±0.25%FS
Operating Temperature: -20C … +85C
Compensation Temperature: 0C … +60C, -2oC … +85C
Digital Output: Calibrated Pressure & Temperature
Analog Output: Calibrated Pressure
Output: 4-20mA, 0-10V, I2C
Overpressure Tolerance: Up to 100x
Media Compatibility: Gases, Liquids
Material Options: SS 316L, Hastelloy, Titanium
Connection Type: M12, ISO4400, Cable
Pneumatic Interface: G1/2″, G1/4″, 1/2″NPT, 1/4″NPT, …

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