Produkt-Neuheit

The PFLOW2008 series of thermal-calorimetric MEMS mass flow sensors developed by Angst + Pfister sets new standards in speed, precision, and versatility. With measurement ranges from 30 sccm to 6 SLPM, a response time of just 1 ms (PFLOW2008N), and a dynamic range of 100:1, the three-variant series covers virtually every application — from leak testing to fast process control.
This makes the PFLOW2008 the ideal product for demanding applications in semiconductor manufacturing, such as die and wire bonding, where maximum dynamics are required. With a medical-grade polyphenylene sulfide (PPS) housing, a maximum pressure of 5 bar, and an integrated pressure compensator to counter altitude-related errors, the series is also the right choice for ventilators, analytical instruments, and industrial automation. The new PFLOW2008, featuring a 4th-generation MEMS chip and Thermal-D technology, extends the portfolio to flow rates of up to 6 SLPM with a temperature coefficient of <±0.08 %/°C.
The Angst + Pfister team will be glad to support you in adapting the sensor to your application.