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SILICON MICROSENSORS FOR FINE PRESSURES for Differential measurement - 701x series on TO Headers

The silicon microsensor 701 series ( SmPs 701s) is a differential fine pressure
sensor to detect the pressure by the change of the resistivity of a silicon resistor
when an external mechanical stress is applied (in this case: pressure). The
micromachine piezoresistive silicon pressure sensors chip line with a pressure
proportional voltage output signal
Our design concept have been optimized according to the application and
technologies allow high accuracy measurements of differential pressure.
The silicon diaphragm is processed to the order of microns utilizing the state
of the art micro-machining technology.
The design was made in COVENTOR, the technological steps have a number of 4
masks used to configure the layers (silicon nitride, silicon dioxide, metals, etc.)
The membrane has 1x1 mm2 and the overall chip is 3x3 mm2. The pressure
sensor is integrated in CMOS technology adding special micromachining
processes. The application of pressure is done on both sides of the diaphragm
for their use as gauge sensor or for differential pressure.
The dies are probed and shipped on taps or in waffle packs

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