SILICON MICROSENSORS FOR FINE PRESSURES for Differential measurement-701x series on TO Headers
The silicon microsensor 701 series ( SmPs 701s) is a differential fine pressure
sensor to detect the pressure by the change of the resistivity of a silicon resistor
when an external mechanical stree is applied (in this case: pressure). The
micromachine piezoresistive silicon pressure sensors chip line with a pressure
proportional voltage output signal
Our design concept have been optimized according to the application and
technologies allow high accuracy measurements of differential pressure.
The silicon diaphragm is processed to the order of microns utilizing the state
of the art micro-machining technology.