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MEMS Chemoresistive Calorimetric Sensors for CO2 and CH4 Detection

The MEMS sensors foe CO2(carbon dioxide) and CH4 (methan) have the operating
principle based on the change in conductivity due to chemisorbtion a/o calorimetric effects
of gas molecules to be detected at the sensitive layer surface.
The integrated heating element consists of a polysilicon layer underneath the active area. A
temperature sensitive resistor will enable precisely temperature control. The sensor is
integrated as MEMS in CMOS technology compatible by adding special micromachining
Different polymeric films sensitivity gases to be analyzed ,exhibit changes of conductance
in presence of small gases concentration at ppm level.
The sensitivity and stability of MEMS sensors are corresponding for applications during the
measurement at room temperature of polluted air .or air noxes detection.
In some cases a temperature of up to 300° could be applied for cleaning the sensitive
polymer in order to reuse the sensor.
The product design by using CONVENTOR with the microprocessing technologies
summarized specifically for each type

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