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Flow sensors based on the calorimetric measuring principle typically have to be adjusted to a specific medium. A real-time density measurement to correct the measured flow value for pure gases as well as binary gas mixtures opens new dimensions in the field of thermal flow measurement. The primary sensor element is a thermal flow sensor. The secondary sensor
element is a quartz oscillator for gas density determination. Using this combination, calibration data and correction factors can be assigned flexibly and during the running process. Thus, the correct flow value is calculated at any time, independent of the clean gas or mixing ratio.