Ceramic MEMS sensor for combustible gas leak detection
Apr 26, 2023
For a rapid detection of combustible gases in oxygen-rich gas mixtures, Fraunhofer IKTS is developing a sensor based on a micro-electro-mechanical system (MEMS). The function of this sensor is based on the thermal response of a thin heated ceramic membrane with low thermal mass, which is coated with a gas-sensitive catalytic material. Thanks to the thin thickness of the membrane, which is directly integrated into the LTCC housing, the sensor can be used with the lowest heating energy consumption both at constant operating temperature and in pulsed mode.